40 CFR Part 98, Table I-8
Verified against eCFR.gov as of June 20, 2026View official text on eCFR.gov ↗
Manufacturing type/process type/wafer size | N2 O
Semiconductor Manufacturing: |
200 mm or Less: |
| CVD 1-Ui | 1 |
|---|---|
| Other Manufacturing Process 1-Ui | 1 |
300 mm or greater: |
| CVD 1-Ui | 0.5 |
|---|---|
| Other Manufacturing Process 1-Ui | 1 |
LCD Manufacturing: |
| CVD Thin Film Manufacturing 1-Ui | 0.63 |
|---|---|
| All other N2 O Processes | 1 |
[89 FR 31921, Apr. 25, 2024]